Published 1989
| Version v1
Book
Laser-optical processing of electronic materials
Creators
Description
This book contains articles on laser optical processing of electronic materials. Included are the following topics: II-VI and III-V compound semiconductors, deposition and/or etching by lasers, and laser metallization and annealing
Availability note (English)
Soc. of Photo-Optical Instr. Engineers, 1022 19 St., P.O. Box 10, Bellingham, WA 98227 (USA).Additional details
Publishing Information
- Publisher
- Society of Photo-Optical Instrumentation Engineers.
- Imprint Place
- Bellingham, WA (USA)
- Imprint Pagination
- 225 p.
Conference
- Title
- International Society for Optical Engineering (SPIE) conference.
- Dates
- 8-13 Oct 1989.
- Place
- Santa Clara, CA (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 22006069
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S74: ATOMIC AND MOLECULAR PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ATOMS; BEAM-PLASMA SYSTEMS; CADMIUM TELLURIDES; CHEMICAL VAPOR DEPOSITION; EPITAXY; ETCHING; HIGH VACUUM; KRYPTON FLUORIDE LASERS; LASER TARGETS; LASER-RADIATION HEATING; MEETINGS; ORGANOMETALLIC COMPOUNDS; PHOTOIONIZATION; SOLID-STATE PLASMA; SYNCHROTRON RADIATION; THIN FILMS
- Descriptors DEC
- AMPLIFIERS; BREMSSTRAHLUNG; CADMIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; DEPOSITION; ELECTROMAGNETIC RADIATION; EQUIPMENT; EXCIMER LASERS; FILMS; GAS LASERS; HEATING; IONIZATION; LASERS; ORGANIC COMPOUNDS; PLASMA; PLASMA HEATING; RADIATIONS; SURFACE COATING; TARGETS; TELLURIDES; TELLURIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-8910361--.