Published January 1, 2005 | Version v1
Journal article

Self-assembled zinc oxide nanodots on silicon oxide

  • 1. Institute of Materials Science, National Center for Scientific Research 'Demokritos', 15310 Ag. Paraskevi, Athens (Greece)

Description

Self assembled ZnO nanodots are grown by electron beam evaporation of Zn on thermally oxidized silicon substrates and subsequent annealing in oxygen. Characterization by TEM and EELS shows that the quantum dots are indeed zinc oxide single crystals grown with their c-axis perpendicular to the substrate; their distribution and size depends on the deposition parameters of zinc onto the substrates

Availability note (English)

Available online at http://stacks.iop.org/1742-6596/10/121/jpconf5_10_030.pdf or at the Web site for the Journal of Physics. Conference Series (Online) (ISSN 1742-6596) http://www.iop.org/

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
10
Journal Issue
1
Journal Page Range
p. 121-124
ISSN
1742-6596

Conference

Title
2. conference on microelectronics, microsystems and nanotechnology
Dates
14-17 Nov 2004
Place
Athens (Greece)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36107930
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; DEPOSITION; ELECTRON BEAMS; EVAPORATION; MONOCRYSTALS; QUANTUM DOTS; SILICON OXIDES; SPATIAL DISTRIBUTION; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ZINC; ZINC OXIDES
Descriptors DEC
BEAMS; CHALCOGENIDES; CRYSTALS; DISTRIBUTION; ELECTRON MICROSCOPY; ELEMENTS; HEAT TREATMENTS; LEPTON BEAMS; METALS; MICROSCOPY; NANOSTRUCTURES; OXIDES; OXYGEN COMPOUNDS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; SILICON COMPOUNDS; ZINC COMPOUNDS