Reactive sputtering

In reactive sputtering the material removed is different from that initially present in the solid. In the present work sputtering of neutrals by impinging keV ions and by electrons of a few hundred eV is outlined. In section 2 experiments on condensed gases are described. Chemical reactions in the solid are initiated by the impinging energetic particles. In section 3 the solid is silicon. Besides the energetic charged species a thermal neutral beam is directed onto the target and reactions take place between this neutral beam and the target atoms. Mass and energy spectra of sputtered fluxes are discussed. (G.Q.)