Published June 2006
| Version v1
Journal article
Matrix effects in mass spectra of secondary ions at quartz sputtering by molecular oxygen ions
Creators
- 1. Inst. Fiziki Poluprovodnikov NAN Ukrainy, Kiev (Ukraine)
- 2. Inst. Geokhimii Okruzhayushchej Sredy, Kiev (Ukraine)
Description
The wide set of silicon-oxygen matrices SiOx (0 ≤ x ≤ 2) is investigated by secondary ion mass spectroscopy. The samples with equal stoichiometry (and different structure) demonstrate characteristic differences in mass spectra. The connection between the yield of secondary ions and the presence of the certain atomic fragments in the initial matrix is revealed. The computerized simulation of sputtering and ion mixing of the SiOx surface by molecular oxygen ions is carried out to explain the nature of matrix effects
Abstract (Russian)
Методом вторичной ионной масс-спектроскопии исследован широкий набор кремний-кислородных матриц SiOx (0 ≤ x ≤ 2). Образцы одинаковой стехиометрии (и разной структуры) демонстрируют характерные различия в масс-спектрах. Выявлена связь между выходом вторичных ионов и наличием в исходной матрице определенных атомных фрагментов. Для объяснения природы матричных эффектов проведено компьютерное моделирование процессов распыления и ионного перемешивания поверхности SiOx ионами молекулярного кислородаAdditional details
Additional titles
- Original title (Russian)
- Матричные эффекты в масс-спектрах вторичных ионов при распылении кварца ионами молекулярного кислорода
Publishing Information
- Journal Title
- Izvestiya Akademii Nauk. Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
- Journal Volume
- 70
- Journal Issue
- 6
- Journal Page Range
- p. 862-866
- ISSN
- 1026-3489
- CODEN
- IRAFEO
Conference
- Title
- XVII International conference Ion-surface interaction
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- Aug 2005
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38046775
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- COMPUTERIZED SIMULATION; EXPERIMENTAL DATA; ION MICROPROBE ANALYSIS; MASS SPECTRA; MASS SPECTROSCOPY; MOLECULAR IONS; OXYGEN IONS; QUARTZ; SILICON OXIDES; SPUTTERING; SURFACE PROPERTIES; YIELDS
- Descriptors DEC
- CHALCOGENIDES; CHARGED PARTICLES; CHEMICAL ANALYSIS; DATA; INFORMATION; IONS; MICROANALYSIS; MINERALS; NONDESTRUCTIVE ANALYSIS; NUMERICAL DATA; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; SIMULATION; SPECTRA; SPECTROSCOPY
Optional Information
- Notes
- 12 refs., 1 fig., 1 tab.