Published May 9, 2008 | Version v1
Journal article

Disorder-Recrystallization Effects in Low-Energy Beam-Solid Interactions

  • 1. Department of Physics and Astronomy, Vanderbilt University, Nashville, Tennessee 37235 (United States)
  • 2. Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, Tennessee 37235 (United States)
  • 3. Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)

Description

It is widely believed that high-kinetic-energy (>1 keV) recoils in crystalline Si result in the formation of amorphous regions, whereas low-kinetic-energy recoils lead directly to isolated point defects. Here we study the response of a Si crystal using dynamical density-functional calculations and show that recoils of much less than 1 keV result in highly disordered regions that persist for hundreds of femtoseconds. Therefore, beam-induced defect formation is controlled by recrystallization processes during dynamic annealing even following low-energy ion implantation

Additional details

Publishing Information

Journal Title
Physical Review Letters
Journal Volume
100
Journal Issue
18
Journal Page Range
p. 185502-185502.4
ISSN
0031-9007
CODEN
PRLTAO

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
40009766
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; CRYSTALS; DENSITY FUNCTIONAL METHOD; ION IMPLANTATION; KINETIC ENERGY; POINT DEFECTS; RECRYSTALLIZATION
Descriptors DEC
CALCULATION METHODS; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ENERGY; HEAT TREATMENTS; VARIATIONAL METHODS

Optional Information

Notes
(c) 2008 The American Physical Society