Published 1996 | Version v1
Book Metadata-only

A model of the gas-phase chemistry of boron nitride CVD from BCl3 and NH3

Creators

  • 1. Sandia National Labs., Livermore, CA (United States)

Description

The kinetics of gas-phase reactions occurring during the CVD of boron nitride (BN) from BCl3 and NH3 are investigated using an elementary reaction mechanism whose rate constants were obtained from theoretical predictions and literature sources. Plug-flow calculations using this mechanism predict that unimolecular decomposition of BCl3 is not significant under typical CVD conditions, but that some NH3 decomposition may occur, especially for deposition occurring at atmospheric pressure. Reaction of BCl3 with NH3 is rapid under CVD conditions and yields species containing both boron and nitrogen. One of these compounds, Cl2BNH2, is predicted to be a key gas-phase precursor to BN

Additional details

Additional titles

Augmented title (English)
Chemical Vapor Deposition

Publishing Information

Publisher
Materials Research Society.
Imprint Place
Pittsburgh, PA (United States)
ISBN
1-55899-313-4
Imprint Title
Covalent ceramics III -- Science and technology of non-oxides
Imprint Pagination
499 p.
Series
Materials Research Society symposium proceedings, Volume 410.
Journal Page Range
p. 459-464.

Conference

Title
Fall meeting of the Materials Research Society (MRS).
Dates
27 Nov - 1 Dec 1995.
Place
Boston, MA (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
28048355
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
AMMONIA; BORON CHLORIDES; BORON NITRIDES; CHEMICAL VAPOR DEPOSITION; MATHEMATICAL MODELS; PREDICTION EQUATIONS; REACTION KINETICS; THEORETICAL DATA
Descriptors DEC
BORON COMPOUNDS; CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; DATA; DEPOSITION; EQUATIONS; HALIDES; HALOGEN COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; INFORMATION; KINETICS; NITRIDES; NITROGEN COMPOUNDS; NITROGEN HYDRIDES; NUMERICAL DATA; PNICTIDES; SURFACE COATING

Optional Information

Funding organization
USDOE, Washington, DC (United States).
Secondary number(s)
CONF-951155--.