Published April 15, 2020
| Version v1
Journal article
Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors
- 1. Max-Planck Institute of Quantum Optics (Germany)
- 2. Ludwig-Maximilians-Universitaet Muenchen (Germany)
- 3. Cutting Edge Coatings GmbH (Germany)
Description
We have compared two kinds of dispersive mirrors (DMs) produced by magnetron sputtering and ion beam sputtering. One of them is a broadband DM which is known as double-angle DM, providing a group delay dispersion (GDD) of in the range of 550–1050 nm. The other one is a robust highly dispersive mirror, which provides a GDD of about at 800 nm and covers the wavelength range from 690 to 890 nm. For the first time, a comparison between magnetron-sputtering-produced and ion-beam-sputtering-produced dispersive mirrors is performed.
Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics. B, Lasers and Optics
- Journal Volume
- 126
- Journal Issue
- 5
- Journal Page Range
- vp.
- ISSN
- 0946-2171
- CODEN
- APBOEM
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 55058456
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON IONS; CARBON IONS; COMPARATIVE EVALUATIONS; DEPOSITION; DISPERSION RELATIONS; DISPERSIONS; ION BEAMS; MAGNETRONS; MIRRORS; SPUTTERING; TIME DELAY; WAVELENGTHS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; EVALUATION; IONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES
Optional Information
- Copyright
- Copyright (c) 2020 © The Author(s) 2020