H1+ density effect on implantation parameters, blistering and self-induced desorption of implanted hydrogen under irradiation of metals

To elucidate the mechanism of the blister nucleation depth effect on the parameters of hydrogen ion inplantation, the effect of the hydrogen ion flux density on implantation and desorption of implanted hydrogen is investigated. The study was carried out on polycrystalline and monocrystalline targets of Pt, Wi Ni, Cu, Al under irradiation with 25 keV hydrogen ions at different temperatures (20.4, 78, 295 K). The flux density varied from 1x1013 to 2x1015 cm-2s-1, radiation doses - from 1x1016 to 1x1019 cm-2. The dependences of the implantation coefficient as a function of the ion density and the time dependence of the self-induced desorption rate are presented. The anomalous self-induced desorption in Al monocrystals are observed. Quantitative analysis of the data obtained is given