Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere

We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 μm diameter at 9 mA and the optimum value of gas velocityxdiameter for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of E/N strength for 200 μm (0.31 m2/s) and 500 μm (0.78 m2/s) air discharge at 8 mA under the velocity of 156 m/s. As a result, an increase of 46.7% in E/N strength of the discharge of 200 μm hole was obtained compare to that of 500 μm