Published February 15, 1978 | Version v1
Journal article Metadata-only

Improvements in the chemistry of secondary ion mass spectrometry - negative ion techniques

Creators

  • 1. Illinois Univ., Urbana (USA). Materials Research Lab.
  • 2. General Ionex Corporation, Ipswich, MA 01938, USA

Description

no abstract available

Additional details

Identifiers

DOI
10.1016/0029-554x(78)90928-x;

Publishing Information

Journal Title
Nuclear Instruments and Methods
Journal Volume
149
Journal Issue
1-3
Series
Nucl. Instrum. Methods.
Journal Page Range
567
ISSN
0029-554X

Conference

Title
3. international conference on ion beam analysis.
Dates
27 Jun - 1 Jul 1977.
Place
Washington, D.C., USA.

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
9386869
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ANIONS; CESIUM IONS; DEPTH; DOPED MATERIALS; IMPURITIES; ION EMISSION; ION PROBES; ION SOURCES; MASS SPECTROSCOPY; SECONDARY EMISSION; SEMICONDUCTOR MATERIALS; SENSITIVITY; SPATIAL DISTRIBUTION; SURFACES
Descriptors DEC
ATOMIC IONS; CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; EMISSION; IONS; PROBES; SPECTROSCOPY

Optional Information

Notes
Published in summary form only.; Updated automatically by Metadata and Full-Text Enrichment Agent