YBaCuO epitaxial film formation by magnetron sputtering with facing targets, 1
Creators
- 1. Nippon Telegraph and Telephone Corp., Tokai, Ibaraki (Japan). Applied Electronics Labs.
Description
YBa2Cu3O7-δ(YBCO) thin films were prepared on non-rotating MgO(100) substrates at 630degC using dc magnetron sputtering with facing targets (dc-MSFT) and the influence of target and substrate positions on film characteristics, such as superconducting properties, composition (CCu/Y, CBa/Y), crystallinity and uniformity was investigated. Spatial positions at which as-grown epitaxial films with Tce=90 K were deposited were consequently found. Away from the center position, the composition of thin film deviated from a stoichiometric composition, that is, both CCu/Y and CBa/Y had a tendency to decrease. As-grown films with of Tce over 88 K were obtained in a 5 x 5 cm2 area of the substrate. The deposition rate was about 20 A/min at the center position and decreased by 22% at a position 2.5 cm away from the center. (author)
Additional details
Additional titles
- Subtitle (English)
- Effects of target and substrate positions
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics, Part 1
- Journal Volume
- 30
- Journal Issue
- 5
- Series
- Jpn. J. Appl. Phys., Part 1.
- Journal Page Range
- 939-944
- ISSN
- 0021-4922
- CODEN
- JAPND
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 22081951
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- BARIUM OXIDES; COPPER OXIDES; ELECTRIC CONDUCTIVITY; ELECTRON DIFFRACTION; EPITAXY; MAGNETRONS; SPUTTERING; SUPERCONDUCTING FILMS; TEMPERATURE DEPENDENCE; THIN FILMS; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; COPPER COMPOUNDS; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS