Published 1972
| Version v1
Book
Cerium oxide films from a chloride source
Creators
Description
no abstract available
Additional details
Additional titles
- Augmented title (English)
- CVD oxidation of CeCl_3 to form cerium oxide films
Publishing Information
- Publisher
- American Nuclear Society.
- Imprint Place
- Hinsdale, IL
- Imprint Title
- Proceedings of the third international conference on chemical vapor deposition
- Imprint Pagination
- p. 475-480.
Conference
- Title
- 3. international conference on chemical vapor deposition.
- Dates
- 24 Apr 1972.
- Place
- Salt Lake City, Utah, USA.
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 5105511
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CERIUM CHLORIDES; CERIUM OXIDES; CHEMICAL VAPOR DEPOSITION; ELECTRICAL PROPERTIES; FILMS; OXIDATION
- Descriptors DEC
- CERIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; CHEMICAL REACTIONS; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; HALIDES; HALOGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RARE EARTH COMPOUNDS; SURFACE COATING
Optional Information
- Notes
- Imprint:See CONF-720410--.