Published January 1994 | Version v1
Journal article

Influence of target temperature on metallic compound growth for pulsed ion implantation

  • 1. Beijing Normal Univ., BJ (China). Inst. of Low Energy Nuclear Physics

Description

Growth of metallic compounds during the pulsed Ti or Mo ion implantation into steel and Al is studied experimentally and theoretically. The relation of the compound growth law with target temperature rise is given. A comparison of the results of pulsed ion implantation with the in situ TEM observation shows that the growth temperature during implantation (400 degree C) is much lower than that during annealing (600 degree C), which indicates that the flux of vacancies and interstitials can promote the growth of metallic compounds. More than ten kinds of the compounds have been obtained using MEVVA ion implantation. Because the compounds are formed in the implanted layer, hardness of the implanted layer increases and the wear property is improved

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
17
Journal Issue
1
Journal Page Range
p. 7-12.
ISSN
0253-3219
CODEN
NUTEDL