Published August 2007 | Version v1
Journal article

Formation of nanoparticles on the silicon surface under the effect of femtosecond laser pulses

  • 1. Moscow State University, Physics Department (Russian Federation)

Description

Nanoparticles were formed on the surface of single-crystal silicon as a result of irradiation of this surface with femtosecond laser pulses. According to the data of the atomic-force microscopy, the height of these nanoparticles ranges from 2 to 30 nm and their transverse size varies from 70 to 200 nm

Additional details

Identifiers

Publishing Information

Journal Title
Semiconductors
Journal Volume
41
Journal Issue
8
Journal Page Range
p. 998-1001
ISSN
1063-7826
CODEN
SMICES

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39098079
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ATOMIC FORCE MICROSCOPY; LASER RADIATION; MONOCRYSTALS; NANOSTRUCTURES; PARTICLES; PHYSICAL RADIATION EFFECTS; PULSED IRRADIATION; SILICON; SURFACES
Descriptors DEC
CRYSTALS; ELECTROMAGNETIC RADIATION; ELEMENTS; IRRADIATION; MICROSCOPY; RADIATION EFFECTS; RADIATIONS; SEMIMETALS

Optional Information

Copyright
Copyright (c) 2007 Pleiades Publishing, Ltd.