Growth specifics and electrical properties of tellurium films

A study was made on growth peculiarities and electric properties of tellurium films, depending on technological deposition conditions. Dependences of charge carrier mobility and concentration of Te films with mirror surface on thickness are presented. More effective decrease of charge carrier concentration, as compared to corresponding increase of their mobility, takes place. This results to increase of film specific resistance. Samples with specific resistance from 0.0091 up to 5.82 Ω/cm were prepared depending on thickness and deposition conditions. Slightly understated values of charge carrier mobility are probably related with peculiarities of film surface development