Electron stimulated desorption of gases at technological surfaces of aluminium
Creators
- 1. Liverpool Univ. (UK). Dept. of Electrical Engineering and Electronics
Description
The release of gas by electron bombardment at aluminium alloy surfaces in vacuum < 10-9 torr has been investigated for a range of treatments including bakeout and glow discharge cleaning. Particular attention has been given to the role of continuous electron bombardment, with current densities and electron energies of up to 1.5 mA cm-2 and 2.0 keV, respectively, over the 10 cm2 of surface area under irradiation. The observations of desorption efficiency, defined as the number of desorbed molecules per incident electron, conform to a model involving a dynamic balance between adsorption and desorption, with contributions to adsorption from both surface and sub-surface gas. Continuous electron bombardment promotes a surface with low desorption efficiency, < 10-5 mol/electron, however, the conditioning cycle is accelerated significantly by glow discharge treatment. There is evidence of some short-term memory when the samples are exposed to air. (author)
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 39
- Journal Issue
- 5
- Series
- Vacuum.
- Journal Page Range
- 463-469
- ISSN
- 0042-207X
- CODEN
- VACUA
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 20050341
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ALUMINIUM BASE ALLOYS; CURRENT DENSITY; DEGASSING; DESORPTION; EFFICIENCY; ELECTRON BEAMS; GLOW DISCHARGES; KEV RANGE 01-10; LEP STORAGE RINGS; SURFACE CLEANING; ULTRAHIGH VACUUM; VACUUM SYSTEMS
- Descriptors DEC
- ALLOYS; ALUMINIUM ALLOYS; BEAMS; CLEANING; ELECTRIC DISCHARGES; ENERGY RANGE; KEV RANGE; LEPTON BEAMS; PARTICLE BEAMS; STORAGE RINGS; SURFACE FINISHING