Published 1989 | Version v1
Journal article

Electron stimulated desorption of gases at technological surfaces of aluminium

  • 1. Liverpool Univ. (UK). Dept. of Electrical Engineering and Electronics

Description

The release of gas by electron bombardment at aluminium alloy surfaces in vacuum < 10-9 torr has been investigated for a range of treatments including bakeout and glow discharge cleaning. Particular attention has been given to the role of continuous electron bombardment, with current densities and electron energies of up to 1.5 mA cm-2 and 2.0 keV, respectively, over the 10 cm2 of surface area under irradiation. The observations of desorption efficiency, defined as the number of desorbed molecules per incident electron, conform to a model involving a dynamic balance between adsorption and desorption, with contributions to adsorption from both surface and sub-surface gas. Continuous electron bombardment promotes a surface with low desorption efficiency, < 10-5 mol/electron, however, the conditioning cycle is accelerated significantly by glow discharge treatment. There is evidence of some short-term memory when the samples are exposed to air. (author)

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
39
Journal Issue
5
Series
Vacuum.
Journal Page Range
463-469
ISSN
0042-207X
CODEN
VACUA