Published 2006
| Version v1
Journal article
Hydrogen Negative Ion Obtainment into Beam-Plasma Discharge
Creators
- 1. RNS 'Kurchatov Institute', Moscow (Russian Federation)
Description
In this paper it is considered a possibility of a hydrogen negative ion obtainment at hydrogen plasma etching of carbon into a beam-plasma discharge. The usage perspective of beam-plasma discharge for carbon etching is connected with this fact that plasma etching is one of a way on the auto emission carbon cathodes with the emission high density centers
Additional details
Additional titles
- Original title (Russian)
- Получение отрицательных ионов водорода в пучково-плазменном разряде
Publishing Information
- Journal Title
- Voprosy Atomnoj Nauki i Tekhniki
- Journal Issue
- no.5/5
- Journal Page Range
- p. 72-74
- ISSN
- 1562-6016
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 38085062
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- BEAM-PLASMA SYSTEMS; CARBON; CATHODES; ELECTRIC DISCHARGES; ELECTRON BEAM INJECTION; ETCHING; FEASIBILITY STUDIES; HYDROGEN IONS; LANGMUIR PROBE; MAGNETIC FIELDS; VACUUM SYSTEMS
- Descriptors DEC
- BEAM INJECTION; CHARGED PARTICLES; ELECTRIC PROBES; ELECTRODES; ELEMENTS; IONS; NONMETALS; PROBES; SURFACE FINISHING