Published December 1, 2019 | Version v1
Journal article

Radial non-uniform piezoelectric response of perovskite islands in thin PZT films

  • 1. Ioffe Institute, 194021 St.-Petersburg (Russian Federation)
  • 2. National University of Science and Technology (MISIS), 119049 Moscow (Russian Federation)
  • 3. Russian Technological University (MIREA), 119454 Moscow (Russian Federation)
  • 4. Herzen State Pedagogical University of Russia, 191186 St.-Petersburg (Russian Federation)

Description

A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO2/TiO2/Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/699/1/012041

Additional details

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
699
Journal Issue
1
Journal Page Range
[5 p.]
ISSN
1757-899X

Conference

Title
SPM-2019-RCWDFM Joint International Conference
Dates
25-28 Aug 2019
Place
Ekaterinburg (Russian Federation)

INIS