Published December 1, 2019
| Version v1
Journal article
Radial non-uniform piezoelectric response of perovskite islands in thin PZT films
- 1. Ioffe Institute, 194021 St.-Petersburg (Russian Federation)
- 2. National University of Science and Technology (MISIS), 119049 Moscow (Russian Federation)
- 3. Russian Technological University (MIREA), 119454 Moscow (Russian Federation)
- 4. Herzen State Pedagogical University of Russia, 191186 St.-Petersburg (Russian Federation)
Description
A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO2/TiO2/Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1757-899X/699/1/012041Additional details
Identifiers
Publishing Information
- Journal Title
- IOP Conference Series. Materials Science and Engineering (Online)
- Journal Volume
- 699
- Journal Issue
- 1
- Journal Page Range
- [5 p.]
- ISSN
- 1757-899X
Conference
- Title
- SPM-2019-RCWDFM Joint International Conference
- Dates
- 25-28 Aug 2019
- Place
- Ekaterinburg (Russian Federation)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 53007041
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- MORPHOLOGY; PEROVSKITE; PIEZOELECTRICITY; POLARIZATION; PZT; SILICA; SILICON; SILICON OXIDES; SUBSTRATES; THIN FILMS; TITANIUM OXIDES
- Descriptors DEC
- CHALCOGENIDES; ELECTRICITY; ELEMENTS; FILMS; LEAD COMPOUNDS; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PEROVSKITES; SEMIMETALS; SILICON COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS