Numerical simulation of RF oxygen discharge characteristics at atmospheric pressure

Based on diffuse and drift assumption, a 1-D fluid model of atmospheric pressure oxygen RF discharge was developed. The model includes continuity equations for electrons, positive and negative ions, and energy equation, and Poisson equation for eclectic potential. The finite difference method was adopted to solve the model by numerical simulation. The simulation results show that the electron density and electron temperature were 10¹²cm^-3 and 1.23 eV, respectively, and the main negative ion was O^-. As the peak of voltage increased, the electron density and electron temperature increased, however, the ratio of O^-/n_e had a maximum value at 700 V. (authors)