Self-aligned molding technology (SAMT) for fabrication of 3D structures with a foldable imprint mold

We propose self-aligned molding technology (SAMT) as a novel nanoimprint technique with a self-aligned foldable imprint mold to control size and shape of structures and particles for a broad range of materials. SAMT is a single-step molding process for complex 3D shaped structures and particles using a reusable double-sided mold with a hinge. We present the fabrication process of SAMT molds, including electron beam lithography on a sloped surface, angular dry etching, and a template-based double inversion technique. We present fabricated SAMT molds and molding results of micro-scale 3D structures.