Published March 2004
| Version v1
Journal article
Analysis of element heterogeneity of Si1-xGex solid solutions by low-energy iron scattering spectroscopy
- 1. RAN, Fiziko-Tekhnicheskij Inst. im. A.F. Ioffe, Sankt-Peterburg (Russian Federation)
Description
The new methodology for evaluating the concentration of the Ge atoms cluster fraction in the Si1-xGex solid solution with low germanium content (x ∼ 1-5%) is proposed. The above methodology is based on the analysis of the scattered ions energy distributions by bombarding the studied surface through the keV-energies ion beam and application of the double ion scattering effect
Abstract (Russian)
Предложена методика оценки концентрации кластерной фракции атомов Ge в твердом растворе Si1-xGex с малым содержанием германия (x ∼ 1-5%). Методика основана на анализе энергетических распределений рассеянных ионов при бомбардировке исследуемой поверхности пучком ионов кэВ-энергий и на использовании эффекта двухкратного ионного рассеянияAdditional details
Additional titles
- Original title (Russian)
- Исследование элементной неоднородности твердых растворов Си
Publishing Information
- Journal Title
- Izvestiya Akademii Nauk. Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
- Journal Volume
- 68
- Journal Issue
- 3
- Journal Page Range
- p. 380-384
- ISSN
- 1026-3489
- CODEN
- IRAFEO
Conference
- Title
- 16. International conference on ion-surface interaction (ISI-2003)
- Original Conference Title
- XVI Mezhdunarodnaya konferentsiya: vzaimodejstvie ionov s poverkhnost'yu VIP-2003
- Dates
- Aug 2003
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 36037865
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- GERMANIUM; ION BEAMS; ION SPECTROSCOPY; IONS; KEV RANGE; SCATTERING; SILICON; SOLID SOLUTIONS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; DISPERSIONS; ELEMENTS; ENERGY RANGE; HOMOGENEOUS MIXTURES; METALS; MIXTURES; SEMIMETALS; SOLUTIONS; SPECTROSCOPY
Optional Information
- Notes
- 7 refs., 4 figs.