Published 2003 | Version v1
Miscellaneous Metadata-only

GISAXS study of hydrogen implanted silicon

Creators

  • 1. Rudjer Boskovic Institute, Zagreb (Croatia)
  • 2. Sinchrotrone Trieste, Trieste (Italy)
  • 3. Universita di Modena and Reggio Emilia, Modena (Italy)

Description

no abstract available

Part of:
Abstracts of The European Materials Conference E-MRS 2003 Fall Meeting

Additional details

Publishing Information

Imprint Title
Abstracts of The European Materials Conference E-MRS 2003 Fall Meeting
Imprint Pagination
287 p.
Journal Page Range
p. 85

Conference

Title
European Materials Conference E-MRS 2003 Fall Meeting
Dates
15-19 Sep 2003
Place
Warsaw (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
35101101
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
ANNEALING; BORN APPROXIMATION; CRYSTAL DEFECTS; DIFFUSION; HYDROGEN IONS; ION IMPLANTATION; MONOCRYSTALS; ROUGHNESS; SILICON; SMALL ANGLE SCATTERING; SYNCHROTRON RADIATION; TEMPERATURE RANGE 0065-0273 K; TEMPERATURE RANGE 0273-0400 K; TEMPERATURE RANGE 0400-1000 K; THICKNESS; X RADIATION
Descriptors DEC
BREMSSTRAHLUNG; CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; HEAT TREATMENTS; IONIZING RADIATIONS; IONS; RADIATIONS; SCATTERING; SEMIMETALS; SURFACE PROPERTIES; TEMPERATURE RANGE

Optional Information