A Study on the Detection of Surface Acoustic Waves by Noncontact Method

Surface Acoustic Waves(SAW) are generated on silicon wafer and YZ-LiTaO3 substrate and are detected by noncontact method. As wave sources two kinds of transducers are used : the wedge-type of 20.0 MHz and fabricated Interdigital Transducer(IDT) of 20.8 MHz. SAW are modulated by the optical chopper frequency and are synchronized with a laser beam. In signal processing, intensity variations of light due to the intensity of SAW are analyzed using lock- in amplifier. From the results, corresponding to the applied input power, the intensity variations of a deflected light by corrugations on the substrates are increased and saturation phenomenon is observed