Structure and optical properties of ZnO thin films grown by magnetron sputtering
- 1. Belarusian state university, Minsk (Belarus)
- 2. School of physics, Trinity college, The university of Dublin, Dublin (Ireland)
- 3. Lobachevsky state university of Nizhny Novgorod, Nizhny Novgorod (Russian Federation)
Description
ZnO films of different thicknesses have been formed on quartz and oxidized Si substrates using a magnetron sputtering technique. RS and PL spectroscopy as well as measurements of absorption and reflectance spectra were used in order to investigate a phase composition and optical properties of deposited films. RS data confirmed the wurtzite structure of ZnO as well as the presence of Zni , VO , or defect complexes containing Zni in ZnO. Thin ZnO films (14 and 40 nm) revealed an optical reflectance lower than that of bare SiO2/Si substrates in the visible and IR range. Annealed ZnO films exhibit strong emission in blue and red spectral range. It indicates a potential application of them as antireflection coatings for silicon based solar cells and light-emitting structure. (authors)
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Additional details
Additional titles
- Original title (English)
- Vzaimodejstvie izluchenij s tverdym telom. Materialy 14. Mezhdunarodnoj konferentsii, posvyashchennoj 100-letiyu Belorusskogo gosydarstvennogo universitena
Publishing Information
- Imprint Place
- Minsk (Belarus)
- Imprint Title
- Interaction of radiation with solids. Proceedings of 14. International conference, dedicated to the 100th anniversary of the Belarusian state university
- Imprint Pagination
- 618 p.
- Journal Page Range
- p. 392-395
- ISSN
- 2706-9060
- Report number
- INIS-BY--108
Conference
- Title
- 14. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 14. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 21 Sep - 24 Sep 2021
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 54123845
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABSORPTION SPECTRA; ANNEALING; ANTIREFLECTION COATINGS; CRYSTAL STRUCTURE; LIGHT EMITTING DIODES; MAGNETRONS; OPTICAL PROPERTIES; SILICON; SILICON OXIDES; SOLAR CELLS; SPECTRAL REFLECTANCE; SPUTTERING; SUBSTRATES; THIN FILMS; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; COATINGS; DIRECT ENERGY CONVERTERS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; HEAT TREATMENTS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PHYSICAL PROPERTIES; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES; SEMIMETALS; SILICON COMPOUNDS; SOLAR EQUIPMENT; SPECTRA; ZINC COMPOUNDS
Optional Information
- Notes
- 11 refs., 5 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 14. Mezhdunarodnoj konferentsii, posvyashchennoj 100-letiyu Belorusskogo gosydarstvennogo universitena