Published June 1990
| Version v1
Journal article
X-ray photoelectron spectroscopy of micrometer-size surface area using synchrotron radiation
- 1. Hitachi Ltd., Kokubunji, Tokyo (Japan). Central Research Lab.
Description
An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4μm was achieved in the beam intensity profile. A Si (2P) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics, Part 2
- Journal Volume
- 29
- Journal Issue
- 6
- Series
- Jpn. J. Appl. Phys., Part 2.
- Journal Page Range
- L1026-L1028
- ISSN
- 0021-4922
- CODEN
- JAPLD
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 21095204
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- CHEMICAL BONDS; FOCUSING; MIRRORS; PHOTOELECTRON SPECTROSCOPY; SEMICONDUCTOR DETECTORS; SILICON; SPATIAL DISTRIBUTION; SURFACES; SYNCHROTRON RADIATION; X RADIATION
- Descriptors DEC
- BREMSSTRAHLUNG; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; ELEMENTS; IONIZING RADIATIONS; MEASURING INSTRUMENTS; RADIATION DETECTORS; RADIATIONS; SEMIMETALS; SPECTROSCOPY