Published 1988 | Version v1
Miscellaneous

Defect formation in GaAs at silicon multicharged ion implantation

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Дефектообразование в GaAs при имплантации многозарядными ионами кремния

Publishing Information

Imprint Title
Summaries of reports of the 18. All-union conference on charged particle interaction with crystals
Journal Page Range
p. 134.
Report number
INIS-SU--98

Conference

Title
18. All-union conference on charged particle interaction with crystals.
Dates
30 May - 1 Jun 1988.
Place
Moscow (USSR).

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
20053850
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CRYSTAL DEFECTS; CRYSTAL-PHASE TRANSFORMATIONS; GALLIUM ARSENIDES; ION IMPLANTATION; MONOCRYSTALS; MULTICHARGED IONS; RADIATION DOSES; SILICON IONS
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; ATOMIC IONS; CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; GALLIUM COMPOUNDS; IONS; PHASE TRANSFORMATIONS

Optional Information

Notes
Short note. Imprint:Tezisy dokladov 18. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.