Published 1990 | Version v1
Miscellaneous

TiN use as diffusion barrier between Mo, Co, Pd and Ni thin films and monocrystalline silicon

  • 1. Universidade Federal, Rio de Janeiro, RJ (Brazil). Coordenacao dos Programas de Pos-graduacao de Engenharia

Description

Published in summary form only

Availability note (English)

Available from the Library of Comissao Nacional de Energia Nuclear, RJ, Brazil.

Additional details

Additional titles

Original title (Portuguese)
Utilizacao de TiN comno barreira de difusao entre filmes finos de Mo, Co, Pd e Ni e silicio monocristalino

Publishing Information

Imprint Title
Proceedings of the 13. National Meeting on Condensed Matter Physics
Imprint Pagination
284 p.
Journal Page Range
p. 256.

Conference

Title
13. National Meeting on Condensed Matter Physics.
Dates
8-12 May 1990.
Place
Caxambu, MG (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
22039765
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract, Non-conventional Literature
Descriptors DEI
COBALT; DIFFUSION BARRIERS; MOLYBDENUM; NICKEL; NITROGEN; PRASEODYMIUM; SILICON; TITANIUM COMPOUNDS
Descriptors DEC
ELEMENTS; METALS; NONMETALS; RARE EARTHS; SEMIMETALS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS

Optional Information

Notes
Imprint:Anais do 13. Encontro Nacional de Fisica da Materia Condensada.