Investigation of the tribological behavior and its relationship to the microstructure and mechanical properties of a-SiC:H films elaborated by low frequency plasma assisted chemical vapor deposition

Amorphous hydrogenated silicon carbide (a-SiC:H) coatings are promising candidates for tribological applications in the mechanical and aeronautical industries. Alternately high values of hardness H (15 < H < 32 GPa) and elastic modulus E contribute to their good wear resistance as well as to a low friction coefficient. The latter has been found to vary in the range 0.1 < μ < 0.65, depending upon the microstructure of the layers. The roughness of the films determined by atomic force microscopy is in all cases low (Ra ∼ 5 nm). Comparisons between the tests carried out in air and those performed under vacuum conditions point to a substantial role of the adhesive part of the friction coefficient in vacuum. They also highlight the role played by the transfer layer between the film and the pin in producing a low friction coefficient for several coatings. This transfer layer consists chiefly of silicon and oxygen (O/Si ∼ 2), whilst low quantities of carbon are also present.