Subtraction tool for the analysis of RBS data

A universal fitting procedure for Rutherford backscattering (RBS) spectra has been developed. It allows to precisely determine step heights in spectra of thick layer samples. With the help of a subtraction algorithm the important parts of a spectrum can be filtered from unwanted background such as multiple scattering or event pile-up. The subtracted data can be analysed by any usual RBS simulation software. The procedure has been tested with simulated and with experimental RBS spectra. The results obtained for the composition of thick layer samples after the subtraction procedure have been compared to the values found by standard RBS-analysis tools with the untreated data. A significant reduction in effort and an improvement in accuracy is obtained