Published 2018
| Version v1
Miscellaneous
Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-Enhanced Atomic Layer Deposition
Creators
- 1. Institute of Solid State Physics, Graz University of Technology, Graz (Austria)
Description
no abstract available
Additional details
Additional titles
- Original title (English)
- 68. Jahrestagung der Österreichischen Physikalischen Gesellschaft
Identifiers
Publishing Information
- Publisher
- Institute of Experimental Physics, Graz University of Technology
- Imprint Place
- Graz (Austria)
- Imprint Title
- 68th Annual Meeting of the Austrian Physical Society
- Imprint Pagination
- 150 p.
- Journal Page Range
- p. 79
Conference
- Title
- 68. Annual Meeting of the Austrian Physical Society
- Original Conference Title
- 68. Jahrestagung der Österreichischen Physikalischen Gesellschaft
- Dates
- 10-13 Sep 2018
- Place
- Graz (Austria)
INIS
- Country of Publication
- Austria
- Country of Input or Organization
- Austria
- INIS RN
- 50038948
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- CARBON; DEPOSITION; ELECTRICAL PROPERTIES; ELLIPSOMETRY; LAYERS; OPACITY; PIEZOELECTRICITY; REFRACTIVE INDEX; SEMICONDUCTOR MATERIALS; SENSITIVITY; SENSORS; SUBSTRATES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; TEXTURE; THIN FILMS; X-RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; ELECTRICITY; ELECTRON SPECTROSCOPY; ELEMENTS; FILMS; MATERIALS; MEASURING METHODS; NONMETALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PHYSICAL PROPERTIES; SPECTROSCOPY; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Notes
- Imprint:68. Jahrestagung der #Latin Capital Letter O With Diaeresis#sterreichischen Physikalischen Gesellschaft