Published February 1990 | Version v1
Journal article

Ion mixing of Au-InP and Au-GaP interfaces

  • 1. Kaunasskij Politekhnicheskij Inst., Kaunas (USSR)

Description

Ion mixing effect at the interface of InP and GaP monocrystals with applied gold film is investigated. Samples are irradiated by 75 keV energy argon ions with 1014-3x1016 cm-2 doses and then annealed at 320 deg C in helium flow. Investigations by Rutherford backscattering method have been shown that starting with 1016 cm-2 dose a weak mutual diffusion of Au and Ga and a more intense Au and In diffusion take place. Destruction of InP crystal lattice and surface layer amorphization are observed under effect of radiation

Additional details

Additional titles

Original title (Russian)
Ионное перемешивание границы раздела Ау-InP и Ау-GaP

Publishing Information

Journal Title
Zhurnal Tekhnicheskoj Fiziki
Journal Volume
60
Journal Issue
2
Series
Zh. Tekh. Fiz.
Journal Page Range
220-221
ISSN
0044-4642
CODEN
ZTEFA