Published October 1989 | Version v1
Journal article Metadata-only

Substrate bias effect on the formation process

Creators

  • 1. Tokyo Univ. (Japan). Faculty of Engineering

Description

Published in summary form only

Additional details

Publishing Information

Journal Title
IONICS
Journal Volume
15
Journal Issue
10
Series
IONICS.
Journal Page Range
191-193
CODEN
IONID

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
21033148
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ELECTRIC CONDUCTIVITY; EMISSION SPECTRA; MAGNETRONS; RUTHERFORD SCATTERING; SPUTTERING; SYNTHESIS; THIN FILMS; TITANIUM NITRIDES
Descriptors DEC
ELASTIC SCATTERING; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; SCATTERING; SPECTRA; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS