Measurement of ion temperature in magnetized inductively coupled plasma with external helical antenna

Production of magnetized inductively coupled plasma with external helical antenna was discussed. The z-component of ion temperature Tiparallel was measured by a directional analyzer with high angular resolution of about 1.2 degree. It was revealed that with increasing gas pressure p, Tiparallel decreased from 2.4 to 0.4 eV. This tendency has been already encountered such as Schottky's theory describing electron temperature in an unmagnetized positive column considering only non-elastic collisions