Published June 12, 1989 | Version v1
Journal article

Chemical vapor deposition of the superconducting YBa2Cu3O/sub 7-x/ phase using halides as metal sources

  • 1. University of Uppsala, Department of Solid State Physics, Box 534, S-751 21 Uppsala, Sweden
  • 2. University of Uppsala, Department of Inorganic Chemistry, Thin Film and Surface Chemistry Group, Box 531, S-751 21 Uppsala, Sweden (Sweden)

Description

It is shown for the first time that the superconducting YBa2Cu3O/sub 7-x/ phase can be deposited by chemical vapor deposition using the halide precursors YCl3, BaI2, and CuCl as metal sources and an O2/H2O gas mixture. Sintered calcium stabilized zirconia plates were used as substrates. The superconductor was obtained upon deposition without the need for post-annealing. An ideal (001) texture was always found to prevail

Additional details

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
54
Journal Issue
24
Series
Appl. Phys. Lett.
Journal Page Range
2476-2478
ISSN
0003-6951
CODEN
APPLA