Published June 12, 1989
| Version v1
Journal article
Chemical vapor deposition of the superconducting YBa2Cu3O/sub 7-x/ phase using halides as metal sources
Creators
- 1. University of Uppsala, Department of Solid State Physics, Box 534, S-751 21 Uppsala, Sweden
- 2. University of Uppsala, Department of Inorganic Chemistry, Thin Film and Surface Chemistry Group, Box 531, S-751 21 Uppsala, Sweden (Sweden)
Description
It is shown for the first time that the superconducting YBa2Cu3O/sub 7-x/ phase can be deposited by chemical vapor deposition using the halide precursors YCl3, BaI2, and CuCl as metal sources and an O2/H2O gas mixture. Sintered calcium stabilized zirconia plates were used as substrates. The superconductor was obtained upon deposition without the need for post-annealing. An ideal (001) texture was always found to prevail
Additional details
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 54
- Journal Issue
- 24
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 2476-2478
- ISSN
- 0003-6951
- CODEN
- APPLA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 20083729
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ANNEALING; BARIUM IODIDES; BARIUM OXIDES; CHEMICAL VAPOR DEPOSITION; COPPER CHLORIDES; COPPER OXIDES; EXPERIMENTAL DATA; LOW TEMPERATURE; OXYGEN; SUPERCONDUCTING FILMS; SUPERCONDUCTIVITY; TEXTURE; THIN FILMS; TRANSITION TEMPERATURE; VAPOR DEPOSITED COATINGS; VERY HIGH TEMPERATURE; WATER; YTTRIUM CHLORIDES; YTTRIUM OXIDES; ZIRCONIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; COATINGS; COPPER COMPOUNDS; COPPER HALIDES; DATA; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; HALIDES; HALOGEN COMPOUNDS; HEAT TREATMENTS; HYDROGEN COMPOUNDS; INFORMATION; IODIDES; IODINE COMPOUNDS; NONMETALS; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; POLAR SOLVENTS; SOLVENTS; SURFACE COATING; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS; ZIRCONIUM COMPOUNDS