Published March 1992
| Version v1
Journal article
Damage profiles in MgO after ion implantation
Description
Damage depths in MgO <100> after implantation of 150 keV argon, krypton and xenon ions were analyzed by means of α-particle channeling in a backscattering geometry. Ion fluences ranged between 4x1014 to 1x1016 at.cm-2 and all implantations were performed at room temperature. Even at the highest ion dose only partial lattice disorder was observed, which is typical for ionic crystals. However, in all cases damage depths exceeded the projected ion ranges significantly. This effect becomes more pronounced with increasing ion mass. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B
- Journal Volume
- 65
- Journal Issue
- 1-4
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 287-290
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 6. conference on radiation effects in insulators.
- Dates
- 24-28 Jun 1991.
- Place
- Weimar (Germany).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23070743
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALPHA PARTICLES; ANNEALING; ARGON IONS; BACKSCATTERING; ION CHANNELING; ION IMPLANTATION; IONIC CRYSTALS; KEV RANGE 100-1000; KRYPTON IONS; MAGNESIUM OXIDES; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; XENON IONS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; CHANNELING; CHARGED PARTICLES; CRYSTALS; ENERGY RANGE; HEAT TREATMENTS; HELIUM IONS; IONIZING RADIATIONS; IONS; KEV RANGE; MAGNESIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; RADIATIONS; SCATTERING