Published March 1992 | Version v1
Journal article

Damage profiles in MgO after ion implantation

  • 1. Dept. of Physics, Univ. of Pretoria (South Africa)

Description

Damage depths in MgO <100> after implantation of 150 keV argon, krypton and xenon ions were analyzed by means of α-particle channeling in a backscattering geometry. Ion fluences ranged between 4x1014 to 1x1016 at.cm-2 and all implantations were performed at room temperature. Even at the highest ion dose only partial lattice disorder was observed, which is typical for ionic crystals. However, in all cases damage depths exceeded the projected ion ranges significantly. This effect becomes more pronounced with increasing ion mass. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B
Journal Volume
65
Journal Issue
1-4
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
287-290
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
6. conference on radiation effects in insulators.
Dates
24-28 Jun 1991.
Place
Weimar (Germany).