Published June 11, 2003
| Version v1
Journal article
Nano-Microelectronics by Plasma and Electron Beam Techniques
Creators
- 1. Plasma Physics Research Center, I.A.U. Tehran (Iran, Islamic Republic of)
- 2. Faculty of Electr. Engineering, University of Applied Science, Deggendorf (Germany)
- 3. Dept. Theoretical Physics, University of New South Wales, Sydney 2052 (Australia)
Description
For production of transistor electronics for lengths below the optical to ultraviolet wavelengths, technologies with plasmas and electron- ion- and neutral beams are studies where a combination with laser driven ion beam sources is involved. The same can be used for production of p-n junctions in silicon, gallium arsenide or conducting polymers diodes and solar cells
Additional details
Identifiers
- DOI
- 10.1063/1.1593931;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 669
- Journal Issue
- 1
- Journal Page Range
- p. 327-329
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 11. international congress on plasma physics
- Acronym
- ICPP 2002
- Dates
- 15-19 Jul 2002
- Place
- Sydney (Australia)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36068279
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DEPOSITION; ELECTRON BEAMS; ELECTRONS; GALLIUM ARSENIDES; INTEGRATED CIRCUITS; ION BEAMS; IONS; LASER MATERIALS; LASER RADIATION; MICROELECTRONICS; P-N JUNCTIONS; PLASMA; POLYMERS; SILICON; SOLAR CELLS; TRANSISTORS; ULTRAVIOLET RADIATION
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CHARGED PARTICLES; DIRECT ENERGY CONVERTERS; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; ELEMENTARY PARTICLES; ELEMENTS; EQUIPMENT; FERMIONS; GALLIUM COMPOUNDS; LEPTON BEAMS; LEPTONS; MATERIALS; MICROELECTRONIC CIRCUITS; PARTICLE BEAMS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PNICTIDES; RADIATIONS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR JUNCTIONS; SEMIMETALS; SOLAR EQUIPMENT
Optional Information
- Notes
- (c) 2003 American Institute of Physics