A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure

This paper reports the design, fabrication and testing of a three-dimensional zinc–air microbattery with improved areal energy density and areal capacity, particularly at high discharge rates. The device is based on a multilayer, micron-scale, low-resistance metallic skeleton with an improved surface area. This skeleton consists of alternating Cu and Ni layers supporting Zn as electrodeposited anode electrode, and provides a high surface area, low-resistance path for electron transfer. A proof-of-concept zinc–air microbattery based on this technology was developed, characterized and compared with its two-dimensional thin-film counterparts fabricated on the same footprint area with equal amount of the Zn anode electrode. Using this approach, we were able to improve a single-layer initial structure with a surface area of 1.3 mm2 to a scaffold structure with ten layers having a surface area of 15 mm2. Discharging through load resistances ranging from 100 to 3000 Ω, the areal energy density and areal capacity of the microbattery were measured as 2.5–3 mWh cm−2 and ∼2.5 mAh cm−2, respectively.