X-ray imaging of structural defects in Si1−xGex single crystals using a white synchrotron beam

Nonmonochromatic (white) synchrotron radiation with a high spatial coherence makes it possible to use different types of interaction of X-rays with matter simultaneously: diffraction, refraction, absorption, and fluorescence. In this case, the structure of materials is studied by the real-time recording of high-resolution images of different types under the same conditions. The use of X-ray images for studying the structural quality is demonstrated by the example of Czochralski-grown Si1−xGex single crystals. The effect that the germanium content has on the formation and evolution of the defect structure is analyzed and the relationship between the structure and properties is investigated. The experiments were performed on the Pohang Light Source (Pohang, Republic of Korea).