On the application of cw external cavity quantum cascade infrared lasers for plasma diagnostics

Three continuous wave external cavity quantum cascade lasers (EC-QCLs) operating between 1305 and 2260 cm−1 (4.42–7.66 µm) have been tested as radiation sources for an absorption spectrometer focused on the analysis of physical and chemical phenomena in molecular plasmas. Based on the wide spectral tunability of EC-QCLs, multiple species detection has become feasible and is demonstrated in a study of low-pressure Ar/N2 microwave plasmas containing methane as a hydrocarbon precursor. Using the direct absorption technique, the evolution of the concentrations of CH4, C2H2, HCN and H2O has been monitored depending on the discharge conditions at a pressure of p = 0.5 mbar and at a frequency of f = 2.45 GHz in a planar microwave plasma reactor. The concentrations were found to be in the range of 1011–1014 molecules cm−3. In addition, based on the analysis of the line profile of selected absorption lines, the gas temperature Tg has been calculated in dependence on the discharge power. Tg increased with the power values and was in the range between 400 and 700 K. Further, in a pure He/Ar microwave plasma, the wavelength modulation spectroscopy technique has been applied for the sensitive detection of transient plasma species with absorbencies down to 10−5. The typical spectral line width of an EC-QCL under the study was found to be in the range 24 to 38 MHz depending (i) on the chopping technique used and (ii) on a single or averaged measurement approach. Further, different methods for the modulation and tuning of the laser radiation have been tested. Varying the power values of an EC-QCL between 0.1 and 154 mW for direct absorption measurements under low pressure conditions, no saturation effects in determining the concentrations of methane, acetylene and carbon monoxide could be found under the experimental conditions used, i.e. for lines with line strengths between 10−19 and 10−22 cm molecule−1. (paper)