Annealing effect on the magnetic induced austenite transformation in polycrystalline freestanding Ni-Co-Mn-In films produced by co-sputtering

Ni-Co-Mn-In freestanding films, with a magneto-structural transformation at room temperature were successfully produced by co-sputtering and post-annealing methods leading to film composition mastering. For a post-annealing temperature of 700 °C, the phase transformation occurs slightly above room temperature, with a twisted martensitic microstructure phase observed at 300 K by Field Emission Scanning Electron Microscopy. Magnetization measurements on a polycrystalline film showed a phase transformation from a weakly magnetic martensite to a magnetic austenite phase. Moreover, an inverse magnetocaloric effect with an entropy variation of 4 J/kg K under 5 T was also measured. A simple magneto-actuation experiment based on the magnetic induced austenite transformation was also successfully completed. The possibility to insert such films in microsystems is clearly demonstrated in this work