A thermalization energy analysis of the threshold voltage shift in amorphous indium gallium zinc oxide thin film transistors under positive gate bias stress
Creators
- 1. Electrical Engineering Division, Cambridge University, J J Thomson Avenue, Cambridge CB3 0FA (United Kingdom)
- 2. i3N/CENIMAT, Department of Materials Science, Faculty of Science and Technology, Universidade NOVA de Lisboa and CEMOP/UNINOVA, Campus de Caparica, 2829-516 Caparica (Portugal)
- 3. Holst Centre/TNO, High Tech Campus 31, 5656AE Eindhoven (Netherlands)
- 4. 252, Valley Drive, Kendal LA9 7SL (United Kingdom)
Description
Thin film transistors (TFTs) employing an amorphous indium gallium zinc oxide (a-IGZO) channel layer exhibit a positive shift in the threshold voltage under the application of positive gate bias stress (PBS). The time and temperature dependence of the threshold voltage shift was measured and analysed using the thermalization energy concept. The peak energy barrier to defect conversion is extracted to be 0.75 eV and the attempt-to-escape frequency is extracted to be 107 s−1. These values are in remarkable agreement with measurements in a-IGZO TFTs under negative gate bias illumination stress (NBIS) reported recently (Flewitt and Powell, J. Appl. Phys. 115, 134501 (2014)). This suggests that the same physical process is responsible for both PBS and NBIS, and supports the oxygen vacancy defect migration model that the authors have previously proposed.
Additional details
Identifiers
- DOI
- 10.1063/1.4943249;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 108
- Journal Issue
- 9
- Journal Page Range
- p. 093505-093505.4
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 48036320
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- ELECTRIC POTENTIAL; ENERGY ANALYSIS; GALLIUM; INDIUM; LAYERS; MIGRATION; OXYGEN; STRESSES; TEMPERATURE DEPENDENCE; THERMALIZATION; THIN FILMS; TRANSISTORS; VACANCIES; ZINC; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELEMENTS; FILMS; METALS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; POINT DEFECTS; SEMICONDUCTOR DEVICES; SLOWING-DOWN; ZINC COMPOUNDS
Optional Information
- Notes
- (c) 2016 AIP Publishing LLC