Published November 1987 | Version v1
Miscellaneous

High dose implantation of Zn in c-axis sapphire (α-Al2O3)

  • 1. Royal Melbourne Inst. of Tech. (Australia). Dept. of Applied Physics
  • 2. Royal Melbourne Inst. of Tech. (Australia). Microelectronics Technology Centre

Description

Changes in the amorphous layer, produced by high dose implantation of Zn ions into sapphire, upon annealing are studied. While for lower doses of implantation the amorphous layer converts to γ-phase at 800 deg C before regrowth of the α-phase occurs, it is seen that there is a critical dose of Zn above which the amorphous layer does not change but instead shows loss of Zn from the surface

Part of:
Fifth Australian conference on nuclear techniques of analysis : proceedings

Additional details

Publishing Information

Publisher
AINSE.
Imprint Place
Lucas Heights (Australia)
Imprint Title
Fifth Australian conference on nuclear techniques of analysis : proceedings
Imprint Pagination
266 p.
Journal Page Range
p. 125-127.
Report number
INIS-mf--11495

Conference

Title
5. Australian conference on nuclear techniques of analysis.
Dates
4-6 Nov 1987.
Place
Lucas Heights (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
20059725
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AMORPHOUS STATE; ION IMPLANTATION; SAPPHIRE; ZINC
Descriptors DEC
CORUNDUM; ELEMENTS; METALS; MINERALS; OXIDE MINERALS

Optional Information