Mass and kinetic energy distributions of secondary neutral and ionized particle under MeV-energy ion bombardment

We have measured mass spectra and axial emission energy distribution of secondary neutral and ionized particles from an InSb target bombarded by 3.0 MeV Si ion. Secondary ions were measured with a linear- and a reflective-type time-of-flight technique, while secondary neutral particles were photoionized by a UV pulsed laser (ArF: 193nm) and measured with a reflective-type time-of-flight technique. The Sb/In ratio of the secondary ions was one order of magnitude less than of neutral particles. The mean energy of neutral Sb atoms was much lower than that of neutral In atoms, whereas the mean energies of secondary In and Sb ions were nearly equal. (author)