Published June 1, 2001
| Version v1
Journal article
Fabrication of ATLAS pixel detector prototypes at IRST
Description
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed
Additional details
Identifiers
- PII
- S0168900201003539;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
- Journal Volume
- 465
- Journal Issue
- 1
- Journal Page Range
- p. 83-87
- ISSN
- 0168-9002
- CODEN
- NIMAER
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Germany
- INIS RN
- 33059422
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- ELECTRICAL PROPERTIES; FABRICATION; JUNCTION DETECTORS; POSITION SENSITIVE DETECTORS; SI SEMICONDUCTOR DETECTORS
- Descriptors DEC
- MEASURING INSTRUMENTS; PHYSICAL PROPERTIES; RADIATION DETECTORS; SEMICONDUCTOR DETECTORS
Optional Information
- Copyright
- Copyright (c) 2001 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.