Published 1970 | Version v1
Book Metadata-only

Use of oxygen additive to control residual fluorine in chemical vapor deposited tungsten

Creators

Description

no abstract available

Additional details

Publishing Information

Publisher
Inst. of Electrical and Electronics Engineers, Inc.
Imprint Place
New York
Imprint Title
IEEE Conference Record of 1970 Thermionic Conversion Specialist Conference
Imprint Pagination
p. 72-73.

Conference

Title
Thermionic conversion specialist conference.
Dates
26 Oct 1970.
Place
Miami Beach, Fla.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
3021432
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BUBBLES; CHEMICAL REACTIONS; DEPOSITION; FLUORINE; HYDROGEN; OXYGEN; POROSITY; REDUCTION; RESIDUES; SOLIDIFICATION; TUNGSTEN; TUNGSTEN FLUORIDES; VAPORS; VOIDS
Descriptors DEC
ELEMENTS; FLUIDS; FLUORIDES; GASES; HALOGENS; HYDROGEN ISOTOPES; ISOTOPES; LIGHT NUCLEI; METALS; NONMETALS; NUCLEI; PHASE TRANSFORMATIONS; STABLE ISOTOPES; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TUNGSTEN COMPOUNDS