Published April 2011 | Version v1
Journal article Metadata-only

Electrical and plasma parameters of ICP with high coupling efficiency

Creators

  • 1. RF Plasma Consulting, Brookline, MA 024461 (United States)

Description

A novel design of ICP with high coupling efficiency is presented. The efficiency augmentation is achieved using a thin window and an antenna coil enhanced by a ferromagnetic core. Considerable improvement of ICP electrical and plasma characteristics is demonstrated through experiments in ICP operated at 2 MHz in a wide range of argon gas pressures between 1 mTorr and 1 Torr, and discharge power between 15 W and 0.5 KW.

Availability note (English)

Available from http://dx.doi.org/10.1088/0963-0252/20/2/025004

Additional details

Identifiers

DOI
10.1088/0963-0252/20/2/025004;
PII
S0963-0252(11)56294-2;

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
20
Journal Issue
2
Journal Page Range
[7 p.]
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43019860
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
ARGON; COUPLING; DESIGN; EFFICIENCY; PLASMA
Descriptors DEC
ELEMENTS; FLUIDS; GASES; NONMETALS; RARE GASES