Effect of annealing treatment on structure of Ag doped ZnO films deposited by thermal evaporation method

The Ag doped ZnO films were prepared on sapphire substrates using simple thermal evaporation method. The effect of annealing treatment was investigated in detail. The results shows that the annealed Ag doped ZnO film has a prefer orientation along c-axis. The E₂ (high) mode in Raman spectra has a little blue shift which caused by crystal defects oxygen vacancies, meanwhile the compressive stress was exist in the film. After annealed, the intense of E₂ modes have great improvement which means the quality of the film was enhanced, meanwhile, the compressive stress released to some extent. (paper)