Published 1988 | Version v1
Miscellaneous Metadata-only

X-ray lithography: an introduction

Creators

  • 1. Centre National de la Recherche Scientifique, 75 - Paris (France). Lab. de Microstructure et Microelectronique

Description

An overview of the various types of litography is presented and discussed (optical, X-rays, electron beam, ion beam etc.). (A.C.A.S.)

Availability note (English)

Available from the Library of the Comissao Nacional de Energia Nuclear, RJ, Brazil.

Abstract (Portuguese)

Apresenta-se uma revisao e discute-se os varios tipos de litografia (otica, raios-X, feixes de eletrons, feixes de ions etc.). (A.C.A.S.)

Additional details

Publishing Information

Imprint Title
Proceedings of the 1. Workshop on Synchrotron Light: Applications and Related Instrumentation
Imprint Pagination
302 p.
Journal Page Range
p. 214-235.

Conference

Title
Applications and Related Instrumentation.
Acronym
1. Workshop on Synchrotron Light
Dates
25-28 Jul 1988.
Place
Campinas, SP (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
21077735
Subject category
S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
Resource subtype / Literary indicator
Conference, Non-conventional Literature
Descriptors DEI
SUBSTRATES; X RADIATION
Descriptors DEC
ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATIONS