Published March 17, 2003 | Version v1
Journal article

Analytical solution of flexural vibration responses on taped atomic force microscope cantilevers

Description

An analytical solution of flexural vibration responses on taped atomic force microscope (AFM) cantilevers has been derived and a closed-form expression obtained. The results coincide with previously published analytical solutions for two special cases that are used with the rectangular AFM cantilever. The analytical solution derived in this Letter, can easily assist in obtaining the resonance frequency at arbitrary dimensions and tip radii. It is useful for the design of the AFM cantilever, including the solid or hollow circular and rectangular cross-section, and can serve to evaluate the accuracy of the approximate or numerical solutions for the AFM cantilever with a complicated cross-section. Furthermore, the solution was confirmed and can also be applied to obtain the resonant frequency of a conical cantilever with an elongated tip which is used for imaging the deep trenches and complex structures

Additional details

Identifiers

DOI
10.1016/S0375-9601(03)00129-4;
arXiv
arXiv:cs/0205042v1;
PII
S0375960103001294;

Publishing Information

Journal Title
Physics Letters. A
Journal Volume
309
Journal Issue
1-2
Journal Page Range
p. 133-137
ISSN
0375-9601
CODEN
PYLAAG

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36086101
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
ACCURACY; ANALYTICAL SOLUTION; ATOMIC FORCE MICROSCOPY; CROSS SECTIONS; NUMERICAL SOLUTION; RESONANCE
Descriptors DEC
MATHEMATICAL SOLUTIONS; MICROSCOPY

Optional Information

Copyright
Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.