Published 2020 | Version v1
Book Metadata-only

Features of deposition of plasma vacuum discharge

Creators

  • 1. Inst. Ionno-Plazmennykh i Lazernykh Tekhnologij AN RUz, Tashkent (Uzbekistan)

Description

The paper presents methods for cleaning the surface of substrates before coating with vacuum-plasma methods. The IR spectra and Raman spectra obtained from analytical studies of the surface state of samples are presented. Based on the analysis of the intensities of the IR and Raman spectra, the dependence of the degree of surface purity of the samples on the cleaning method used is demonstrated

Abstract (Russian)

В работе представлены методы очистки поверхности подложек перед нанесением покрытий вакуумно-плазменными способами. Представлены ИК спектры и спектры комбинационного рассеяния (КР), полученные в результате аналитических исследований состояния поверхности образцов. На основе анализа интенсивностей ИК и КР спектров продемонстрирована зависимость степени чистоты поверхности образцов от применяемого метода очистки
Part of:
VI International conference «Laser, plasma research and technologies – LaPlaz-2020». Collection of scientific papers. Part 2

Additional details

Additional titles

Original title (Russian)
К вопросу оценки очистки поверхности плазмы тлеющего разряда

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-2655-2
Imprint Title
VI International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies #En Dash# LaPlaz-2020#Right-Pointing Double Angle Quotation Mark#. Collection of scientific papers. Part 2
Imprint Pagination
370 p.
Journal Page Range
p. 234-235

Conference

Title
6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''
Original Conference Title
VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»
Dates
11-14 Feb 2020
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
53111000
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
EFFICIENCY; EXPERIMENTAL DATA; GLOW DISCHARGES; INFRARED SPECTRA; PLASMA TECHNOLOGY; RAMAN SPECTRA; SUBSTRATES; SURFACE CLEANING
Descriptors DEC
CLEANING; DATA; ELECTRIC DISCHARGES; INFORMATION; NUMERICAL DATA; SPECTRA; SURFACE FINISHING

Optional Information

Notes
3 refs., 1 fig. Imprint:VI Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#Lazernye, plazmennye issledovaniya i tekhnologii #En Dash# LaPlaz-2020#Right-Pointing Double Angle Quotation Mark#. Sbornik nauchnykh trudov. Chast' 2